シリコンカーバイド反射鏡

Reflective Mirror Diameter

Φ 50mm-1200mm

Reflective Mirror Surface Shape

RMS: Better than 1/60 λ  ( λ =  632.8 nm)

Surface Roughness

<2.5 nm

供給サイクル

2-6 months

Reflective Mirror Diameter (D)

Ø440mm

Surface Feature

Coaxial Aspherical Surface

Lightweight Form

Back

Cycle

3ヶ月

Reflective Mirror Diameter (D)

Ø266mm

Surface Feature

Coaxial Aspherical

Lightweight Form

Back

Cycle

2.25 months

Reflective Mirror Diameter (D)

Ø510mm

Surface Feature

Coaxial Aspherical Surface

Lightweight Form

Back + Asymmetric Center Hole

Cycle

3.5 months

Reflective Mirror Diameter (D)

1270×482mm

Surface Feature

Off-axis Aspherical Surface

Lightweight Form

Back

Cycle

5.75 months (2+10+3+6+2)